SAFARMATOV UCHQUN SOHIBJON O‘G‘LI. LOW TEMPERATURE SILCORE DEPOSITION OF UNDOPED AND DOPED SILICON FILMS. World Scientific Research Journal, [S. l.], v. 40, n. 2, p. 50–60, 2025. Disponível em: https://scientific-jl.com/wsrj/article/view/21062. Acesso em: 25 jun. 2025.