Safarmatov Uchqun Sohibjon o‘g‘li. LOW TEMPERATURE SILCORE DEPOSITION OF UNDOPED AND DOPED SILICON FILMS. WSRJ [Internet]. 2025 Jun. 17 [cited 2025 Jun. 24];40(2):50-6. Available from: https://scientific-jl.com/wsrj/article/view/21062